Bimaterial microcantilevers as a hybrid sensing platform

TitleBimaterial microcantilevers as a hybrid sensing platform
Publication TypeJournal Article
Year of Publication2008
AuthorsS Singamaneni, MC LeMieux, HP Lang, C Gerber, Y Lam, S Zauscher, PG Datskos, NV Lavrik, H Jiang, RR Naik, TJ Bunning, and VV Tsukruk
JournalAdvanced Materials (Deerfield Beach, Fla.)
Volume20
Issue4
Start Page653
Pagination653 - 680
Date Published02/2008
Abstract

Microcantilevers, one of the most common MEMS structures, have been introduced as a novel sensing paradigm nearly a decade ago. Ever since, the technology has emerged to find important applications in chemical, biological and physical sensing areas. Today the technology stands at the verge of providing the next generation of sophisticated sensors (such as artificial nose, artificial tongue) with extremely high sensitivity and miniature size. The article provides an overview of the modes of detection, theory behind the transduction mechanisms, materials employed as active layers, and some of the important applications. Emphasizing the material design aspects, the review underscores the most important findings, current trends, key challenges and future directions of the microcantilever based sensor technology. © 2008 WILEY-VCH Verlag GmbH & Co. KGaA.

DOI10.1002/adma.200701667
Short TitleAdvanced Materials (Deerfield Beach, Fla.)